Structural principle of vacuum plug valve

? ? slide gate valveIt is an important component for isolating two adjacent spaces. In the vacuum industry, plug valves are widely used in various vacuum equipment to isolate areas with different vacuum degrees or to isolate vacuum environments from other gas environments.

With the booming development of the semiconductor industry, vacuum plug valves are increasingly being used in semiconductor vacuum processes. The traditional vacuum plug valve movement mechanism and guide mechanism are located inside the plug valve housing; During the process of driving the valve plate, collisions and friction between parts in the motion mechanism and guide mechanism can generate metal particles, which are introduced into the semiconductor process and contaminate the wafer. In order to overcome these problems, relevant manufacturers have developed a new type of vacuum plug valve.

The vacuum plug valve mainly consists of a housing and a valve plate. The valve plate moves under the drive of two driving devices. The principle is that the driving component 1 drives the valve plate to move up and down as a whole, approaching and moving away from the flange position. The driving component 2 drives the valve plate to move forward and backward, approaching and moving away from the sealing surface of the housing, achieving the "l" - shaped movement of the valve plate, thereby reducing the movement mechanism inside the housing, reducing the generation of metal particles, and preventing the introduction of metal particles into the semiconductor process and contaminating the wafer.